4. Optics: measuring and testing
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Recognition device for recognizing the shape and the position of

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Reference image forming method and pattern inspection apparatus

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Reflectance method for evaluating the surface...

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Reexamination Certificate

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Reflectance method for evaluating the surface...

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Reexamination Certificate

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Reticle used in semiconductor device fabrication and a method fo

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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