4. Optics: measuring and testing
  5. By configuration comparison
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Defect detection through image comparison using relative...

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Reexamination Certificate

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Detection method using electromagnetic wave and detection...

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Reexamination Certificate

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Detection of phase defects on photomasks by differential...

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Reexamination Certificate

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Device for automatically determining the deviation between the s

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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