4. Optics: measuring and testing
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Wafer pattern defect detection method and apparatus therefor

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Wavelength measuring system

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Window contamination detector

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Workpiece identification apparatus

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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