Process and device for checking the conformity of hybridization

Details Process and device for checking the conformity of hybridization Process and device for checking the conformity of hybridization

1994-05-13

1995-09-12

Pham, Hoa Q.

Optics: measuring and testing

By configuration comparison

With comparison to master, desired shape, or reference voltage

356237, G01B 1100

Patent

active

054502063

ABSTRACT:
A process for checking the conformity of hybridization balls present on a chip or a substrate and its implementation device are provided. The process includes positioning the hybridization balls of the electronic component or substrate near a strip transparent to a predetermined wavelength. The hybridization balls are partially flattened against the strip by positioning the electronic component or substrate at a previously defined distance from the transparent strip. The previously defined distance corresponds to a theoretical reference ball height less an acceptable deviation between the theoretical reference ball height and a minimum height of the hybridization balls. The partial flattening creates ball flats on the hybridization balls at the strip. The hybridization balls are illuminated with a light beam of the predetermined wavelength that is emitted through the strip. A portion of the light beam reflected back through the strip by the hybridization balls to be checked and is acquired. Finally, conformity or nonconformity of the hybridization balls to be checked is determined as a function of the portion of said light beam reflected back by each of the hybridization balls.

REFERENCES:
patent: 4803871 (1989-02-01), Harada et al.
patent: 4864122 (1989-09-01), Masaaki et al.
patent: 5131753 (1992-07-01), Pine et al.
NTIS Tech Notes, Jun., 1990, p. 500, `Measuring Gaps in O-Ring Seals`.
IBM Technical Disclosure Bulletin, vol. 29, No. 2, Jul., 1986, pp. 781-782, `Surface-Mounted Component Lead Co-Plararity Mesurement Tool`.
Research Disclosure, No. 333, Jan., 1992, p. 13, `Solder Ball Connection Co-Planarity With X-Ray Technology`.
French Search Report--FA 490305--FR 9306515--Feb. 4, 1994.

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