Pattern test device

Details Pattern test device Pattern test device

2005-01-11

2005-01-11

Font, Frank G. (Department: 2877)

Optics: measuring and testing

By configuration comparison

With comparison to master, desired shape, or reference voltage

C356S237100, C356S237500

Reexamination Certificate

active

06842245

ABSTRACT:
A pattern test device has a reference data generator for generating reference pattern data and setting a first sub-area or a second sub-area in a mask area depending on the accuracy for the pattern test. A threshold selecting section selects first or second threshold depending on the test location residing in the first sub-area or second sub-area, whereby the judgement section judges presence or absence of a defect in the mask area while using the first or second threshold to compare therewith difference data between the test pattern data and the reference pattern data.

REFERENCES:
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patent: 4692690 (1987-09-01), Hara et al.
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patent: 4791586 (1988-12-01), Maeda et al.
patent: 5173719 (1992-12-01), Taniguchi et al.
patent: 5235400 (1993-08-01), Terasawa et al.
patent: 10-38812 (1998-02-01), None

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