4. Optics: measuring and testing
  5. By configuration comparison
  6. With comparison to master, desired shape, or reference voltage
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High speed illumination system for microelectronics inspection

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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High speed pattern inspection method and system

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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