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Methods and apparatus for forming submicron patterns on films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Methods for anisotropic etching of (100) silicon

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
Patent

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Methods for patterning using liquid embossing

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Methods of etching articles via microcontact printing

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Methods of etching articles via microcontact printing

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Methods of etching silicon-oxide-containing compositions

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Methods of fabricating a semiconductor device

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Methods of forming fine patterns in the fabrication of...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Masking of sidewall
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Methods of reducing photoresist distortion while etching in...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Multilayer resist pattern forming method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
Patent

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Nanoimprint lithography

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
Patent

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Nanolithographic method of forming fine lines

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Nanoscale electric lithography

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Non-photolithographic etch mask for submicron features

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
Patent

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Non-photolithographic etch mask for submicron features

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
Patent

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Organic insulation film formation method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Passivation for cleaning a material

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Pattern formation method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Pattern forming method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Patterned product and its manufacturing method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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