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Stamp for use in a lithographic process, method of...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Stamper, lithographic method of using the stamper and method...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Step and flash imprint lithography

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Structure and method including dry etching techniques for formin

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Substrate processing method, substrate processing system,...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Substrate transfer method and interface apparatus

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Susceptor and surface processing method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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System and process for automated microcontact printing

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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System and process for automated microcontact printing

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Textured surface having undercut micro recesses in a surface

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Tunable nanomasks for pattern transfer and nanocluster array...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Ultrafine fabrication method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Ultrafine pattern forming method and ultrafine etching method us

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Use of a chemically active reticle carrier for photomask...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Vapor HF etch process mask and method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Vapor HF etch process mask and method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Wafer processing using thermal nitride etch mask

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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