Stamper, lithographic method of using the stamper and method...

Details Stamper, lithographic method of using the stamper and method... Stamper, lithographic method of using the stamper and method...

2006-02-27

2008-11-25

Culbert, Roberts (Department: 1792)

Etching a substrate: processes

Masking of a substrate using material resistant to an etchant

Mechanically forming pattern into a resist

C430S313000

Reexamination Certificate

active

07455789

ABSTRACT:
A stamper includes a substrate and a plurality of protrusions of different heights formed on one of the surfaces of the substrate, the protrusions of larger height having a stack structure formed of at least two layers of at least two types of materials, thereby transferring a plurality of patterns at the same time.

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