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Dry developing method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
Reexamination Certificate

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Electrochemical method to improve MR reader edge definition...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Etching method, etched product formed by the same, and...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Intermediate layer lithography

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method for forming micro patterns of semiconductor devices

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method for preventing the etch transfer of sidelobes in...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method for producing tapered waveguide

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method of etching and etch mask

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method of etching organic antireflection coating (ARC) layers

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method of fine patterning semiconductor device

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method of fine patterning semiconductor device

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method of post-etching a mechanically treated substrate

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Multilayer resist pattern forming method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Reduction of reflection by amorphous carbon

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Reduction of reflection by amorphous carbon

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Solder mask for manufacture of printed circuit boards

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Structure and method including dry etching techniques for formin

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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