4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant
  6. Mask is multilayer resist
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Electrochemical method to improve MR reader edge definition...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
Reexamination Certificate

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Etching method, etched product formed by the same, and...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
Reexamination Certificate

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