Base material cutting method, base material cutting...

Capture system employing annular fluid stream

Capture system employing diverter fluid nozzle

Composite shadow ring equipped with a sacrificial inner ring

Composition and method for polishing...

Confinement device for use in dry etching of substrate...

Contaminant removal by laser-accelerated fluid

Controlled polymerization on plasma reactor wall

Controlled potential plasma source

Copper-clad board suitable for making hole with carbon...

Cyanuric fluoride and related compounds for anisotropic etching

Dechucking method and apparatus for workpieces in vacuum...

Deformation reduction at the main chamber

Detection of hardmask removal using a selective etch

Device and method for anisotropic plasma etching of a...

Device and method for etching a substrate using an...

Device and method for processing a plasma to alter the surface o

Device transfer method

Dielectric etch process reducing striations and maintaining...

Domed extension for process chamber electrode