Self-supporting thin-film filament detector, process for its man

Details Self-supporting thin-film filament detector, process for its man Self-supporting thin-film filament detector, process for its man

1996-04-10

1998-05-19

Powell, William

Etching a substrate: processes

Etching of semiconductor material to produce an article...

216 18, 216 41, H01L 2100, B44C 122, C23F 100

Patent

active

057531285

ABSTRACT:
Detector of the filament type for determining a static or dynamic characteristic of an ambient medium, constituted by a resistive component intended to be heated by the Joule effect in the medium, and an interface process region suitable for reacting with the medium by a physico-chemical with an effect, depending on the characteristic to be determined, on the electrical characteristic of the interface region, in which there is a supporting member through which there is at least one aperture and at least one filament including the resistive component, composed of one or more thin films and a central portion located in the aperture and end portions via which the central portion is connected to the supporting member.

REFERENCES:
patent: 4544441 (1985-10-01), Hartmann et al.

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