Ceramic electrostatic chuck with built-in heater

Details Ceramic electrostatic chuck with built-in heater Ceramic electrostatic chuck with built-in heater

1994-12-27

1996-10-15

Fleming, Fritz M.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

055660436

ABSTRACT:
The ceramic electrostatic chuck with built-in heater of the present invention is disclosed having electrodes for electrostatic chuck made from an electroconductive ceramic bonded to a surface of a supporting substrate made from an electrically insulating ceramic, a heat generating layer made from an electroconductive ceramic is bonded to the other surface and the side surface and a covering layer made from an electrically insulating ceramic is provided thereon.

REFERENCES:
patent: 5155652 (1992-10-01), Logan et al.
patent: 5280156 (1994-01-01), Niori et al.

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