Ceramic electrostatic chuck and method of fabricating same

Details Ceramic electrostatic chuck and method of fabricating same Ceramic electrostatic chuck and method of fabricating same

1997-12-02

1999-06-01

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, H02N 1300

Patent

active

059093552

ABSTRACT:
Multi-layered, ceramic electrostatic chuck for retaining a substrate in a process chamber is provided. The chuck comprises a first layer having a top surface, a second layer disposed on the top surface of the first layer, and a third layer disposed on top of the second layer. The second layer alters the resistivity of the third layer during the fabrication process of the chuck. As such, the resistivity of the chuck is reduced to a value that facilitates establishment of the Johnsen-Rahbek effect and promotes wafer processing at room temperature.

REFERENCES:
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patent: 4717340 (1988-01-01), Wiech, Jr.
patent: 4722824 (1988-02-01), Wiech, Jr.
patent: 5117121 (1992-05-01), Watanabe et al.
patent: 5151845 (1992-09-01), Watanabe et al.
patent: 5463526 (1995-10-01), Mundt
patent: 5701228 (1997-12-01), Ishii

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