Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1994-06-22
1997-02-25
Fleming, Fritz M.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H02N 1300
Patent
active
056064845
ABSTRACT:
A novel ceramic electrostatic chuck with built-in heater is proposed which is outstandingly durable in use with repeated cycles of heating and cooling because of the absence of troubles due to exfoliation of layers and crack formation in the ceramic body. Differently from conventional ceramic electrostatic chuck with built-in heater consisting of a base plate of sintered body of boron nitride, layers of pyrolytic graphite formed on the surfaces of the base plate to serve, one, as the electrode layer and, the other, as the heater element, and an insulating layer of pyrolytic boron nitride formed on the pyrolytic graphite layers, the base plate in the invention is made of a composite sintered body of a powder mixture of aluminum and boron nitrides in a specified mixing proportion so as to minimize the difference in the thermal expansion coefficient from those of the overlaying layers.
REFERENCES:
patent: 5155652 (1992-10-01), Logan et al.
patent: 5280156 (1994-01-01), Niori et al.
patent: 5324053 (1994-06-01), Kubota et al.
patent: 5384682 (1995-01-01), Watanabe et al.
patent: 5413360 (1995-05-01), Atari et al.
Kawada Nobuo
Yamaguchi Kazuhiro
Fleming Fritz M.
Shin-Etsu Chemical Co. , Ltd.
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