Chuck, lithographic apparatus and device manufacturing method

Details Chuck, lithographic apparatus and device manufacturing method Chuck, lithographic apparatus and device manufacturing method

2006-08-15

2006-08-15

Nguyen, Henry Hung (Department: 2851)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C355S072000, C355S075000

Reexamination Certificate

active

07092231

ABSTRACT:
A lithographic projection apparatus is provided with an electrostatic chuck. The electrostatic chuck includes a dielectric element which has a plurality of pins formed on a first surface. The item to be clamped is clamped in position on the chuck by applying a potential difference between an electrode located on the surface of the dielectric member opposite to the clamping surface and an electrode located on the clamping surface of the item to be clamped. The pins are provided with at least an upper conducting layer, which serves to reduce the Johnsen-Rahbek effect, allowing the substrate to be released more quickly.

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