Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1991-05-02
1993-03-02
Gaffin, Jeffrey A.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
361230, 269 8, 269903, 279128, H02N 1300
Patent
active
051915065
ABSTRACT:
An electrostatic chuck 8 assembly includes, from top to bottom: a top multilayer ceramic insulating layer 10; an electrostatic pattern layer 12 having a conductive electrostatic pattern 16 disposed on a multilayer ceramic substrate; a multilayer ceramic support layer 20; and, a heat sink base 30 having a backside cooling channels machined therein. Layers 12, 12 and 20 are bonded together using multilayer ceramic techniques and the heatsink base 30 is brazed to the bottom of the multilayer ceramic support layer 20.
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Logan Joseph S.
Ruckel Raymond R.
Tompkins Robert E.
Westerfield, Jr. Robert P.
Gaffin Jeffrey A.
International Business Machines - Corporation
Petraske Eric W.
Romanchik Richard A.
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