Multi-grid ion beam source for generating a highly...
Multi-mode treater with internal air cooling system
Multiple electrode plasma reactor power distribution system
Multiple frequency plasma processor method and apparatus
Multiple frequency plasma processor method and apparatus
Multirate processing for metrology of plasma RF source
Nonthermionic hollow anode gas discharge electron beam source
One atmosphere, uniform glow discharge plasma
Operating a plasma process
Optimization of the excitation frequency of a resonator
Optimized ECR plasma apparatus with varied microwave window thic
Optimized helical resonator for plasma processing
Particle accelerator
Particle controller
Particle source for a reactive ion beam etching or plasma deposi
Particle source, especially for reactive ionic etching and plasm
Phase and frequency control of a radio frequency generator...
Planar crossed-field plasma switch and method
Planar gas introducing unit of a CCP reactor
Plasma accelarator arrangement