Multiple electrode plasma reactor power distribution system

Details Multiple electrode plasma reactor power distribution system Multiple electrode plasma reactor power distribution system

1987-09-15

1989-12-12

Boudreau, Leo H.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511181, 31511171, 31511191, H05B 3126

Patent

active

048870056

ABSTRACT:
A multiple electrode plasma reactor power circuit that utilizes a power splitting device, such as a center-tapped coil, to deliver balanced power to a plurality of powered electrodes. Balanced plasmas are thereby created between powered electrodes and grounded electrodes. In a preferred embodiment a plurality of center-tapped coils are connected to deliver balanced power to several powered electrodes located in a plurality of reactor chambers.

REFERENCES:
patent: 4282077 (1981-08-01), Reavill
patent: 4381965 (1983-05-01), Maher, Jr. et al.
patent: 4446560 (1984-05-01), Gabor
patent: 4724296 (1988-02-01), Morley

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