Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent
1993-10-29
1995-05-09
Pascal, Robert J.
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
31511151, 118723E, H01J 724
Patent
active
054143241
ABSTRACT:
A steady-state, glow discharge plasma is generated at one atmosphere of pressure within the volume between a pair of insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. Space between the electrodes is occupied by air, nitrous oxide, a noble gas such as helium, neon, argon, etc. or mixtures thereof. The electrodes are charged by an impedance matching network adjusted to produce the most stable, uniform glow discharge.
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Laroussi Mounir
Liu Chaoyu
Roth John R.
Spence Paul D.
Tsai Peter P.
Gambino Darius
Pascal Robert J.
The University of Tennessee Research Corporation
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