Optimization of the excitation frequency of a resonator

Details Optimization of the excitation frequency of a resonator Optimization of the excitation frequency of a resonator

2011-06-07

2011-06-07

Vu, David Hung (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C315S111510

Reexamination Certificate

active

07956543

ABSTRACT:
A radio frequency plasma generator power supply, including: an interface that receives a request to determine an optimal control frequency; an output interface configured to be connected to a plasma generation resonator; a power supply module configured to apply a voltage at a set point frequency to the output interface, the voltage, depending on its frequency, selectively unable to allow generation of plasma of the resonator on receipt of a request during a phase optimizing power supply frequency of the generator and able to allow generation of plasma of the resonator during an operating phase; an interface that receives an electrical measurement of power supply of the resonator; a module that determines optimal control frequency, successively provides various set point frequencies to the power supply module on receipt of a request, and determines an optimal control frequency depending on electrical measurements received by the reception interface.

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U.S. Appl. No. 12/593,482, filed Sep. 28, 2009, Agneray, et al.
U.S. Appl. No. 12/097,012, filed Jun. 11, 2008, Agneray, et al.

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