Phase and frequency control of a radio frequency generator...

Details Phase and frequency control of a radio frequency generator... Phase and frequency control of a radio frequency generator...

2005-04-18

2009-10-13

Vu, David Hung (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C315S111410, C118S7230IR

Reexamination Certificate

active

07602127

ABSTRACT:
Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit controls the phase and/or the frequency of a RF generator.

REFERENCES:
patent: 5057185 (1991-10-01), Thomas, III et al.
patent: 5116482 (1992-05-01), Setoyama et al.
patent: 5175472 (1992-12-01), Johnson et al.
patent: 5195045 (1993-03-01), Keane et al.
patent: 5228939 (1993-07-01), Chu
patent: 5436424 (1995-07-01), Nakayama et al.
patent: 5556549 (1996-09-01), Patrick et al.
patent: 5565737 (1996-10-01), Keane
patent: 5573595 (1996-11-01), Dible
patent: 5824606 (1998-10-01), Dible et al.
patent: 6252354 (2001-06-01), Collins et al.
patent: 6707255 (2004-03-01), Coumou et al.
patent: 2002/0026251 (2002-02-01), Johnson et al.
patent: 2002/0171411 (2002-11-01), Nasman

Affiliated with

Also associated with

Rating

Phase and frequency control of a radio frequency generator... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Phase and frequency control of a radio frequency generator..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Phase and frequency control of a radio frequency generator... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4092157