Microwave ion source

Microwave plasma applicator with a helical fluid cooling channel

Microwave plasma CVD apparatus with plasma generating chamber co

Microwave plasma generating apparatus

Microwave plasma generating method and apparatus

Microwave plasma generator

Microwave plasma generator and system for decomposing...

Microwave plasma generator with the short cross-sectional...

Microwave plasma generator, method of decomposing organic...

Microwave plasma operation using a high power microwave transmis

Microwave plasma processing apparatus

Microwave plasma source apparatus

Microwave reactive gas discharge device

Microwave stripline applicators

Miniature pulsed vacuum arc plasma gun and apparatus for thin-fi

Modular low aspect ratio-high beta torsatron

Modular segmented cathode plasma generator

Monolithic miniaturized inductively coupled plasma source

Multi chamber plasma process system

Multi-electrode plasma source