Microwave reactive gas discharge device

Details Microwave reactive gas discharge device Microwave reactive gas discharge device

1989-12-21

1992-08-25

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511131, 31511171, 31323131, H05H 124

Patent

active

051421984

ABSTRACT:
A reactive discharge device including an RF cavity with a substantially circular cross-section, with a circular RF field coupled along the longitudinal axis of the cavity. A high volume to surface area ratio volume of reactive gas is created in the cavity. The reactive gas and/or the light created thereby is extracted from the cavity and supplied to a downstream processing area.

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patent: 4992665 (1991-02-01), Mohl
patent: 5010276 (1991-04-01), Echizen et al.

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