Microwave plasma generator

Details Microwave plasma generator Microwave plasma generator

1987-06-22

1989-09-12

Griffin, Robert L.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

315 39, 156643, H01J 724

Patent

active

048663468

ABSTRACT:
A microwave plasma generator for producing an axisymmetric plasma, having a waveguide apparatus, means for introducing a microwave source into the waveguide apparatus, and means for generating a circular axisymmetric microwave field from the microwave source. There are means for tuning the field to match the impedance of a plasma load. Further included is a vacuum chamber for containing a gas to be ionized to form the plasma, means for introducing this gas into the vacuum chamber, and means for coupling the microwave field to the vacuum chamber to form the plasma.

REFERENCES:
patent: 4430138 (1984-02-01), Suzuki et al.
patent: 4507588 (1985-03-01), Asmussen et al.
patent: 4512868 (1985-04-01), Fujimura et al.
patent: 4543465 (1985-09-01), Sakudo et al.
patent: 4560952 (1985-12-01), Tegel et al.

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