Microwave plasma generating apparatus

Details Microwave plasma generating apparatus Microwave plasma generating apparatus

1992-10-30

1993-12-14

Pascal, Robert J.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511181, 31323131, 333 99PL, H01J 724

Patent

active

052706168

ABSTRACT:
A microwave plasma generating apparatus radiates a microwave to a source gas to produce a plasma. A plurality of spaced fins are disposed in a path of travel of the microwave, from the microwave guide to an area of origin of the plasma within the plasma generating chamber to lie in a direction perpendicular to the direction of an electric field of the microwave, for the purpose of locking the position at which the plasma has been produced.

REFERENCES:
patent: 4728910 (1988-03-01), Owens
patent: 4866346 (1989-09-01), Gaudreau et al.
patent: 5003152 (1991-03-01), Matsuo et al.
patent: 5038713 (1991-08-01), Kawakami et al.

Affiliated with

Also associated with

Rating

Microwave plasma generating apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microwave plasma generating apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microwave plasma generating apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1708358