Microwave plasma operation using a high power microwave transmis

Details Microwave plasma operation using a high power microwave transmis Microwave plasma operation using a high power microwave transmis

1991-04-02

1992-06-30

Gensler, Paul

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31323131, 333 99PL, 333252, H01J 726

Patent

active

051266350

ABSTRACT:
A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.

REFERENCES:
patent: 3210699 (1965-10-01), Tagano
patent: 3387237 (1968-06-01), Cook
patent: 4286240 (1981-08-01), Shively et al.
patent: 4371854 (1983-02-01), Cohn et al.
patent: 4458223 (1984-07-01), Schmidt
patent: 4620170 (1986-10-01), Lavering
patent: 4931756 (1990-06-01), Doehler et al.

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