Radiation source with high average EUV radiation output
Radio frequency generating systems and methods for forming pulse
Radio frequency ion beam source
Radio frequency power control system
Radio-frequency plasma source
Radio-frequency powered glow discharge device and method with hi
Reflection coefficient phase detector
Remote ion source plasma electron gun
Remote plasma generator
Resonant chamber applicator for remote plasma source
Resonant radio frequency wave coupler apparatus using higher mod
Resonant radiofrequency wave plasma generating apparatus with im
RF induction plasma source for plasma processing
RF matching network of a vacuum processing chamber and...
RF plasma inductor with closed ferrite core
RF plasma processing method and RF plasma processing system
RF plasma source and antenna therefor
RF plasma source and method for plasma cleaning of surface in sp
RF plasma source for material processing
RF plasma source with quasi-closed solenoidal inductor