Resonant radio frequency wave coupler apparatus using higher mod

Details Resonant radio frequency wave coupler apparatus using higher mod Resonant radio frequency wave coupler apparatus using higher mod

1989-10-20

1992-01-14

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, 31511171, 31511181, 31323131, H05H 118

Patent

active

050813986

ABSTRACT:
An improved apparatus for generating a uniform electron cyclotron resonance (ECR) region in a plasma region (16) of a chamber (15) is described. The apparatus uses higher modes of electrical field cusps (16b) which are essentially perpendicular to the magnetic field cusps (16a) in a controlled manner to produce the ECR. The modes are optimal in the ECR region.

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patent: 4745337 (1988-05-01), Pichot et al.
patent: 4940015 (1990-07-01), Kobashi et al.
patent: 4947085 (1990-08-01), Nakanishi et al.

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