Capacitive feed for plasma reactor

Details Capacitive feed for plasma reactor Capacitive feed for plasma reactor

1987-01-09

1991-04-09

Razavi, Michael

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511131, 31511171, 31511191, H05B 3126

Patent

active

050067605

ABSTRACT:
A capacitive feed is disclosed for the lower electrode in a parallel plate plasma reactor. One plate of the capacitor comprises the lower electrode or a contact to the lower electrode. The other plate of the capacitor comprises an annular member insulated from the lower electrode, or the contact. There are no RF connections directly to the lower electrode.

REFERENCES:
patent: 3489933 (1970-01-01), Meyerand
patent: 4209357 (1980-06-01), Gorin et al.

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