Coaxial resonator microwave plasma generator

Details Coaxial resonator microwave plasma generator Coaxial resonator microwave plasma generator

1999-02-22

2001-03-20

Bettendorf, Justin P. (Department: 2817)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C118S7230MW

Reexamination Certificate

active

06204603

ABSTRACT:

BACKGROUND OF THE INVENTION
Microwave plasmas are employed in technical fields such as, for example, the manufacture or processing of components, in microelectronics, during coating, in the decomposition of gases, synthesis or cleaning of materials.
In the devices, the microwaves are fed by means of coupling points into the plasma chamber, together with the container, i.e. working space, which it may optionally contain, from a microwave generator optionally via a feed to a waveguide resonator around the plasma chamber. It is customary, in particular, to use ring resonators, i.e. waveguide resonators which are designed as a ring and have a short length along their axis in comparison with the relatively large cross-sectional diameter of the resonator ring. It is common for the axis of the ring resonator and the axis of the plasma chamber, in this case for example designed as a tube, to have the same or a common z axis.
According to DE 196 00 223.0-33, the resonator ring has a rectangular cross-section, and the coupling points are, for example, in the form of slots in the short cross-sectional side. Devices of this type for the production of microwave plasmas have high efficiency. However, there is a need for more uniform and more powerful plasma chambers and more simply configured devices.
BRIEF SUMMARY OF THE INVENTION
The invention relates to a device for the production of microwave plasmas, whose resonator is designed as a coaxial resonator with inner and outer conductors. Insofar as the conductors fully or partially form the inner and outer boundaries of the resonator, the shape of the latter and the shape of the conductors is arbitrary. It is preferable if the two conductors have an axial direction which is similar, of the same type or identical, or if they have a common z axis. Surprisingly, a vacuum is not absolutely necessary during operation of the device.


REFERENCES:
patent: 3577207 (1971-05-01), Kirjushin
patent: 5487875 (1996-01-01), Suzuki
patent: 5517085 (1996-05-01), Engemann et al.
patent: 1960022 (1997-07-01), None
patent: 0 564 359 (1993-10-01), None

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