Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent
1997-08-13
1999-09-28
Kinkead, Arnold
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
156345, 118723E, 118723R, 31323131, H01L 2130
Patent
active
059594098
ABSTRACT:
Non-bonded ceramic protection is provided for metal surfaces in a plasma processing chamber, particularly heated metal electrode surfaces, in a plasma processing chamber, to prevent or inhibit attack of the heated metal surfaces by chemically aggressive species generated in the plasma during processing of materials, without bonding the ceramic material to the metal surface. In accordance with the invention the ceramic protection material comprises a thin cover material which is fitted closely, but not bonded, to the heated metal. This form of ceramic protection is particularly useful for protecting the surfaces of glow discharge electrodes and gas distribution apparatus in plasma process chambers used for processing semiconductor substrates to form integrated circuit structures. The particular ceramic material used to provide the desired protection from the gaseous species generated by the plasma are selected from the group consisting of aluminum nitride, crystalline aluminum oxide, magnesium fluoride, and sintered aluminum oxide.
REFERENCES:
patent: 3179213 (1965-04-01), Kuehne et al.
patent: 4078812 (1978-03-01), Beckershoff
patent: 4167351 (1979-09-01), Bindin
patent: 4427516 (1984-01-01), Levinstein et al.
patent: 4491496 (1985-01-01), Laporte et al.
patent: 4526644 (1985-07-01), Fujiyama et al.
patent: 4612432 (1986-09-01), Sharp-Geisler
patent: 4623417 (1986-11-01), Spencer et al.
patent: 4668373 (1987-05-01), Rille et al.
patent: 4693777 (1987-09-01), Hazano et al.
patent: 4793975 (1988-12-01), Drage
patent: 5066381 (1991-11-01), Ohta et al.
patent: 5074456 (1991-12-01), Degner et al.
patent: 5161908 (1992-11-01), Yoshida et al.
patent: 5178681 (1993-01-01), Moore et al.
patent: 5223113 (1993-06-01), Kaneko et al.
patent: 5236151 (1993-08-01), Hagle et al.
patent: 5238499 (1993-08-01), van de Ven et al.
patent: 5252892 (1993-10-01), Koshiishi et al.
patent: 5257872 (1993-11-01), Morgen et al.
patent: 5269894 (1993-12-01), Kerschbaumer
patent: 5272417 (1993-12-01), Ohmi
patent: 5366585 (1994-11-01), Robertson et al.
patent: 5494523 (1996-02-01), Steger et al.
patent: 5589003 (1996-12-01), Zhao et al.
patent: 5680013 (1997-10-01), Dornfest et al.
Bercaw Craig A.
Dornfest Charles N.
Fodor Mark A.
Tomosawa Hiroyuki Steven
White John M.
Applied Materials Inc.
Kinkead Arnold
LandOfFree
Ceramic protection for heated metal surfaces of plasma processin does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Ceramic protection for heated metal surfaces of plasma processin, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ceramic protection for heated metal surfaces of plasma processin will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-707103