Microwave plasma chemical vapor deposition process using a micro
Microwave plasma CVD method for coating a substrate with high th
Microwave plasma generating apparatus and process for the prepar
Microwave RF, or AC/DC discharge assisted flame deposition of CV
Mixed frequency CVD process
Multi-step high density plasma chemical vapor deposition process
Multiphase low dielectric constant material and method of...
Optical waveguide with a substantially planar substrate and proc
Optically transparent, scratch-resistant, diamond-like...
Organic low-dielectric constant films deposited by plasma enhanc
Organometallic compounds, processes for the preparation...
Particle manipulation
Passivation of electronic modules using high density plasmas
PCVD apparatus and a method of manufacturing an optical...
PECVD of compounds of silicon from silane and nitrogen
PECVD of silicon nitride films
PECVD process for forming BPSG with low flow temperature
Plasma apparatus and method
Plasma chemical vapor deposition process for producing a hard mu
Plasma CVD method