Methods for atomic-layer deposition of aluminum oxides in...
Methods for chemical vapor deposition of tungsten on silicon...
Methods for depositing polycrystalline films with engineered...
Methods for forming silicon comprising films using...
Methods for producing low-k CDO films
Methods for producing silicon nitride films and silicon...
Methods for silicon oxide and oxynitride deposition using...
Methods for the deposition and curing of coating compositions
Methods for using porogens and/or porogenated precursors to...
Methods of depositing a metal oxide layer or film using a...
Methods of forming atomic layers of a material on a...
Methods of forming barium strontium titanate layers
Methods of forming material on a substrate, and a method of...
Methods of providing uniform gas delivery to a reactor
Methods of selectively incorporating metals onto substrates
Methods of uniformity control for low flow process and...
MOCVD of indium oxide and indium/tin oxide films on substrates
MOCVD of SBT using tetrahydrofuran-based solvent system for...
MOCVD of SBT using toluene-based solvent system for...
MOCVD process using alkaline earth metal-heptane dionate compoun