Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2006-02-28
2006-02-28
Chen, Bret (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S255700, C427S376100, C427S376200, C438S488000
Reexamination Certificate
active
07005160
ABSTRACT:
Methods for controlling the grain structure of a polycrystalline Si-containing film involve depositing the film in stages so that the morphology of a first film layer deposited in an initial stage favorably influences the morphology of a second film layer deposited in a later stage. In an illustrated embodiment, the initial stage includes an anneal step. In another embodiment, the later stage involves depositing the second layer under different deposition conditions than for the first layer.
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Todd Michael A.
Weeks Keith D.
ASM America Inc.
Chen Bret
Knobbe Martens Olson & Bear LLP
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