Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2007-01-09
2007-01-09
Chen, Bret (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S099300, C427S376200
Reexamination Certificate
active
10137168
ABSTRACT:
The present inventors devised unique atomic-layer deposition systems, methods, and apparatus suitable for aluminum-oxide deposition. One exemplary method entails providing an outer chamber enclosing a substrate, forming an inner chamber within the outer chamber, and introducing an oxidant into the inner chamber, and introducing an aluminum precursor into the inner chamber. The inner chamber has a smaller volume than the outer chamber, which ultimately requires less time to fill and purge and thus promises to reduce cycle times for deposition of materials, such as aluminum oxide.
REFERENCES:
patent: 3357961 (1967-12-01), Makowski et al.
patent: 3381114 (1968-04-01), Nakanuma
patent: 3407479 (1968-10-01), Fordemwalt et al.
patent: 3457123 (1969-07-01), Van Pul
patent: 3471754 (1969-10-01), Hoshi et al.
patent: 3689357 (1972-09-01), Jordan
patent: 4051354 (1977-09-01), Choate
patent: 4058430 (1977-11-01), Suntola et al.
patent: 4209357 (1980-06-01), Gorin et al.
patent: 4215156 (1980-07-01), Dalal et al.
patent: 4292093 (1981-09-01), Ownby et al.
patent: 4305640 (1981-12-01), Cullis et al.
patent: 4333808 (1982-06-01), Bhattacharyya et al.
patent: 4399424 (1983-08-01), Rigby
patent: 4413022 (1983-11-01), Suntola et al.
patent: 4590042 (1986-05-01), Drage
patent: 4604162 (1986-08-01), Sobczak
patent: 4647947 (1987-03-01), Takeoka et al.
patent: 4663831 (1987-05-01), Birrittella et al.
patent: 4673962 (1987-06-01), Chatterjee et al.
patent: 4761768 (1988-08-01), Turner et al.
patent: 4766569 (1988-08-01), Turner et al.
patent: 4767641 (1988-08-01), Kieser et al.
patent: 4894801 (1990-01-01), Saito et al.
patent: 4902533 (1990-02-01), White et al.
patent: 4920071 (1990-04-01), Thomas
patent: 4920396 (1990-04-01), Shinohara et al.
patent: 4948937 (1990-08-01), Blank et al.
patent: 4962879 (1990-10-01), Goesele et al.
patent: 4987089 (1991-01-01), Roberts
patent: 4993358 (1991-02-01), Mahawili
patent: 5001526 (1991-03-01), Gotou
patent: 5006192 (1991-04-01), Deguchi
patent: 5017504 (1991-05-01), Nishimura et al.
patent: 5021355 (1991-06-01), Dhong et al.
patent: 5028977 (1991-07-01), Kenneth et al.
patent: 5032545 (1991-07-01), Doan et al.
patent: 5080928 (1992-01-01), Klinedinst et al.
patent: 5089084 (1992-02-01), Chhabra et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5102817 (1992-04-01), Chatterjee et al.
patent: 5110752 (1992-05-01), Lu
patent: 5122856 (1992-06-01), Komiya
patent: 5156987 (1992-10-01), Sandhu et al.
patent: 5177028 (1993-01-01), Manning
patent: 5198029 (1993-03-01), Dutta et al.
patent: 5202278 (1993-04-01), Mathews et al.
patent: 5208657 (1993-05-01), Chatterjee et al.
patent: 5223081 (1993-06-01), Doan
patent: 5234535 (1993-08-01), Beyer et al.
patent: 5266514 (1993-11-01), Tuan et al.
patent: 5302461 (1994-04-01), Anthony
patent: 5320880 (1994-06-01), Sandhu et al.
patent: 5324980 (1994-06-01), Kusunoki
patent: 5327380 (1994-07-01), Kersh, III et al.
patent: 5376575 (1994-12-01), Kim et al.
patent: 5391911 (1995-02-01), Beyer et al.
patent: 5392245 (1995-02-01), Manning
patent: 5393704 (1995-02-01), Huang et al.
patent: 5396093 (1995-03-01), Lu
patent: 5410169 (1995-04-01), Yamamoto et al.
patent: 5414287 (1995-05-01), Hong
patent: 5414288 (1995-05-01), Fitch et al.
patent: 5416041 (1995-05-01), Schwalke
patent: 5421953 (1995-06-01), Nagakubo et al.
patent: 5422499 (1995-06-01), Manning
patent: 5438009 (1995-08-01), Yang et al.
patent: 5440158 (1995-08-01), Sung-Mu
patent: 5441591 (1995-08-01), Imthurn et al.
patent: 5445986 (1995-08-01), Hirota
patent: 5455445 (1995-10-01), Kurtz et al.
patent: 5460316 (1995-10-01), Hefele
patent: 5460988 (1995-10-01), Hong
patent: 5466625 (1995-11-01), Hsieh et al.
patent: 5483094 (1996-01-01), Sharma et al.
patent: 5483487 (1996-01-01), Sung-Mu
patent: 5492853 (1996-02-01), Jeng et al.
patent: 5495441 (1996-02-01), Hong
patent: 5497017 (1996-03-01), Gonzales
patent: 5504357 (1996-04-01), Kim et al.
patent: 5504376 (1996-04-01), Sugahara et al.
patent: 5508219 (1996-04-01), Bronner et al.
patent: 5508542 (1996-04-01), Geiss et al.
patent: 5522932 (1996-06-01), Wong et al.
patent: 5528062 (1996-06-01), Hsieh et al.
patent: 5562952 (1996-10-01), Nakahigashi et al.
patent: 5572052 (1996-11-01), Kashihara et al.
patent: 5593912 (1997-01-01), Rajeevakumar
patent: 5595606 (1997-01-01), Fujikawa et al.
patent: 5614026 (1997-03-01), Williams
patent: 5616934 (1997-04-01), Dennison et al.
patent: 5625233 (1997-04-01), Cabral, Jr. et al.
patent: 5640342 (1997-06-01), Gonzalez
patent: 5644540 (1997-07-01), Manning
patent: 5646900 (1997-07-01), Tsukude et al.
patent: 5674563 (1997-10-01), Tarui et al.
patent: 5674574 (1997-10-01), Atwell et al.
patent: 5691230 (1997-11-01), Forbes
patent: 5698022 (1997-12-01), Glassman et al.
patent: 5710057 (1998-01-01), Kenney
patent: 5735960 (1998-04-01), Sandhu et al.
patent: 5745334 (1998-04-01), Hoffarth et al.
patent: 5756404 (1998-05-01), Friedenreich et al.
patent: 5795808 (1998-08-01), Park
patent: 5801105 (1998-09-01), Yano et al.
patent: 5810923 (1998-09-01), Yano et al.
patent: 5822256 (1998-10-01), Bauer et al.
patent: 5827571 (1998-10-01), Lee et al.
patent: 5828080 (1998-10-01), Yano et al.
patent: 5840897 (1998-11-01), Kirlin et al.
patent: 5892249 (1999-04-01), Courtright et al.
patent: 5912797 (1999-06-01), Schneemeyer et al.
patent: 5916365 (1999-06-01), Sherman
patent: 5950925 (1999-09-01), Fukunaga et al.
patent: 5963833 (1999-10-01), Thakur
patent: 5994240 (1999-11-01), Thakur
patent: 6013553 (2000-01-01), Wallace et al.
patent: 6017820 (2000-01-01), Ting et al.
patent: 6020024 (2000-02-01), Maiti et al.
patent: 6027960 (2000-02-01), Kusumoto et al.
patent: 6027961 (2000-02-01), Maiti et al.
patent: 6040243 (2000-03-01), Li et al.
patent: 6057271 (2000-05-01), Kenjiro et al.
patent: 6059885 (2000-05-01), Ohashi et al.
patent: 6093623 (2000-07-01), Forbes
patent: 6093944 (2000-07-01), VanDover
patent: 6110529 (2000-08-01), Gardiner et al.
patent: 6114252 (2000-09-01), Donohoe et al.
patent: 6127287 (2000-11-01), Hurley et al.
patent: 6143582 (2000-11-01), Vu et al.
patent: 6161500 (2000-12-01), Kopacz et al.
patent: 6165837 (2000-12-01), Kawakubo et al.
patent: 6171900 (2001-01-01), Sun
patent: 6184146 (2001-02-01), Donohoe et al.
patent: 6194262 (2001-02-01), Noble
patent: 6203613 (2001-03-01), Gates et al.
patent: 6206972 (2001-03-01), Dunham
patent: 6211035 (2001-04-01), Moise et al.
patent: 6211039 (2001-04-01), Noble
patent: 6218293 (2001-04-01), Kraus et al.
patent: 6225168 (2001-05-01), Gardner et al.
patent: 6274479 (2001-08-01), Srinivasan
patent: 6281144 (2001-08-01), Cleary et al.
patent: 6290491 (2001-09-01), Shahvandi et al.
patent: 6291314 (2001-09-01), Henley et al.
patent: 6297539 (2001-10-01), Ma et al.
patent: 6300203 (2001-10-01), Buynoski et al.
patent: 6300255 (2001-10-01), Venkataranan et al.
patent: 6302964 (2001-10-01), Umotoy et al.
patent: 6303481 (2001-10-01), Park
patent: 6303500 (2001-10-01), Jiang et al.
patent: 6313035 (2001-11-01), Sandhu et al.
patent: 6317175 (2001-11-01), Salerno et al.
patent: 6342445 (2002-01-01), Marsh
patent: 6348386 (2002-02-01), Gilmer
patent: 6365519 (2002-04-01), Kraus et al.
patent: 6368941 (2002-04-01), Chen et al.
patent: 6380579 (2002-04-01), Nam et al.
patent: 6387712 (2002-05-01), Yano et al.
patent: 6391769 (2002-05-01), Lee et al.
patent: 6420230 (2002-07-01), Derderian et al.
patent: 6420279 (2002-07-01), Ono et al.
patent: 6432779 (2002-08-01), Hobbs et al.
patent: 6436203 (2002-08-01), Kaizuka et al.
patent: 6444039 (2002-09-01), Nguyen
patent: 6444042 (2002-09-01), Yang et al.
patent: 6444895 (2002-09-01), Nikawa
patent: 6445023 (2002-09-01), Vaartstra et al.
patent: 6448192 (2002-09-01), Kaushik
patent: 6451641 (2002-09-01), Halliyal et al.
patent: 6451662 (2002-09-01), Chudzik et al.
patent: 6451695 (2002-09-01), Sneh
patent: 6454912 (2002-09-01), Ahn et al.
patent: 6458701 (2002-10-01), Chae et al.
patent: 6461436 (2002-10-01), Campbell et al.
patent: 6461914 (2002-10-01), Roberts et al.
patent: 6461970 (2002-10-01), Yin
patent: 6465334 (2002-10-01), Buynoski et al.
patent: 6472321 (2002-10-01), Sriniva
Ahn Kie Y.
Forbes Leonard
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