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Scalable lead zirconium titanate (PZT) thin film material...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Scalable lead zirconium titanate (PZT) thin film material...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Semiconductor manufacturing apparatus including temperature cont

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Sequential chemical vapor deposition

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Silicon dioxide film forming method

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Silicon nitride deposition

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Single substrate processing film forming method

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Single-substrate-processing CVD method of forming film...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Substrate having uniform tungsten silicide film and method of ma

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Substrate support member with a purge gas channel and pumping sy

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Surface pre-treatment for enhancement of nucleation of high...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Synthesis of metal oxide and oxynitride

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Synthesis of W-Si-N films by chemical vapor deposition using WF.

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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