Scalable lead zirconium titanate (PZT) thin film material...
Scalable lead zirconium titanate (PZT) thin film material...
Semiconductor manufacturing apparatus including temperature cont
Sequential chemical vapor deposition
Silicon dioxide film forming method
Silicon nitride deposition
Single substrate processing film forming method
Single-substrate-processing CVD method of forming film...
Substrate having uniform tungsten silicide film and method of ma
Substrate support member with a purge gas channel and pumping sy
Surface pre-treatment for enhancement of nucleation of high...
Synthesis of metal oxide and oxynitride
Synthesis of W-Si-N films by chemical vapor deposition using WF.