Plasma enhanced chemical vapor deposition method of forming...
Plasma enhanced chemical vapor deposition method of forming...
Potassium-containing thin film and process for producing the sam
Precursor, thin layer prepared including the precursor,...
Precursor, thin layer prepared including the precursor,...
Precursors for depositing silicon containing films and...
Precursors for growth of heterometal-oxide films by MOCVD
Precursors for making low dielectric constant materials with...
Preparation method for lead-titanium based thin film
Preparation method for lead-zirconium-titanium based thin film
Process and installation for forming a layer on a substrate
Process and plant for the production of a gaseous mixture...
Process for borosilicate glass films for multilevel metallizatio
Process for chemical vapor deposition of main group metal nitrid
Process for chemical vapor deposition of transition metal nitrid
Process for coating substrates with a silicium-containing layer
Process for depositing a low resistivity tungsten silicon compos
Process for depositing titanium nitride films
Process for diffusing titanium and nitride into a material...
Process for forming a crack-free boron nitride coating on a carb