Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2005-01-03
2009-02-10
Chen, Bret (Department: 1792)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S255360, C438S003000, C438S763000, C438S785000
Reexamination Certificate
active
07488514
ABSTRACT:
A chemical vapor deposition method of forming a barium strontium titanate comprising dielectric layer. A substrate is positioned within a reactor. Barium and strontium are provided within the reactor by flowing at least one metal organic precursor to the reactor. Titanium is provided within the reactor. At least one oxidizer is flowed to the reactor under conditions effective to deposit a barium strontium titanate comprising dielectric layer on the substrate. In one implementation, the oxidizer comprises H2O. In one implementation, the oxidizer comprises H2O2. In one implementation, the oxidizer comprises at least H2O and at least another oxidizer selected from the group consisting of O2, O3, NOx, N2O, and H2O2, where “x” is at least1. In one implementation, the oxidizer comprises at least H2O2and at least another oxidizer selected from the group consisting of O2, O3, NOx, and N2O, where “x” is at least1.
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Alzola Nancy
Basceri Cem
Chen Bret
Micro)n Technology, Inc.
Wells St. John P.S.
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