Tantalum amide complexes for depositing tantalum-containing...
Tantalum amide precursors for deposition of tantalum nitride...
Tantalum compound, process of producing the same, and material f
Textile fabric and yarn composed of synthetic fibers,...
Thermal barrier coating and process therefor
Titanium nitride and multilayers formed by chemical vapor deposi
Titanium tantalum nitride silicide layer
Transient enhanced atomic layer deposition