MOCVD process using alkaline earth metal-heptane dionate compoun

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized

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4272551, 4272553, 4272481, 4271261, 4271263, 505447, 505445, 505734, C23C 1600

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054514347

ABSTRACT:
Alkaline earth metal heptane dionates which have uniform evaporation properties in a vacuum and are therefore highly suitable for use in CVD synthesis for depositing layers containing alkaline earth metal useful in fields such as the production of high temperature superconductors.

REFERENCES:
patent: 3098863 (1963-07-01), Dessauer et al.
patent: 3946057 (1976-03-01), Reedy
patent: 4127361 (1978-11-01), Hellier et al.
patent: 4251233 (1981-02-01), Sievers et al.
patent: 4915988 (1990-04-01), Erbil
patent: 4970093 (1990-11-01), Sievers et al.
patent: 5028724 (1991-07-01), Ivankovits et al.
patent: 5139999 (1992-08-01), Gordon et al.
patent: 5140003 (1992-08-01), Mueller
Chemical Abstracts 116(6):50311m, Feb. 1992.
Chemical Abstracts 114(26):258508x, Jul. 1991.
Murdock et al., "Acylation of Metal Chelates. Part 1.", pp. 2153-2162 (1962).
Hammond et al., "Chelates of .beta.-Diketones. V. Preparation and Properties of Chelates Containing Sterically Hindered Ligands", Inorganic Chemistry, vol. 2, No. 1, pp. 73-76 (1963).
Berg et al., "Fractional Sublimation of Various Metal Chelates of Dipivaloylmethane", Analytica Chimica Acta, vol. 60, pp. 117-125 (1972).
Dickinson et al., "Chemical Vapor Deposition of YBa.sub.2 Cu.sub.3 O.sub.7-x Superconducting Films", J. Appl. Phys. vol. 66, No. 1, pp. 444-447 (1989).
Pierson, "Handbook Of Chemical Vapor Deposition (CVD), Principles, Technology and Applications", Noyes Publications, 1992 p. 87.
Mehrotra et al, "Metal .beta.-diketonates and allied derivatives," Academic Press, pp. 17-19 and 58-61 (1978).
Abe et al, "Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-8 Film Formation by an OM-CVD method" Jpn. J. Appl. Phys. 27(8) Aug. 1988 pp. L1473-L1475.
Yamane et al, "Formation of Bismuth Strontium Calcium Copper Oxide Superconducting Films by Chemical Vapor Deposition", Jpn. J. Appl. Phys. 27(8) Aug. 1988 pp. L1495-L1497.

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