Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2011-04-19
2011-04-19
Chen, Bret (Department: 1715)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S255320, C427S255600
Reexamination Certificate
active
07927661
ABSTRACT:
Methods of depositing a single or mixed metal oxide layer or film are described herein. The methods use a rare earth metal precursor are described herein. The rare earth metal precursors have a general formula M[OCR1(R2)(CH2)X]3, wherein M is a rare earth metal, R1is H or an alkyl group, R2is an optionally substituted alkyl group and X is selected from OR and NR, wherein R is an alkyl group or a substituted alkyl group.
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Chen Bret
Harness & Dickey & Pierce P.L.C.
Sigma-Aldrich Co.
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