Wafer holder with peripheral lift ring

Wafer holder with stiffening rib

Wafer holding apparatus

Wafer holding, wafer support member, wafer boat and heat...

Wafer load/unload apparatus for E-Gun evaporation process

Wafer orientation alignment system

Wafer out-of-pocket detector and susceptor leveling tool

Wafer pedestal with a purge ring

Wafer process tube apparatus and method for vertical furnaces

Wafer processing apparatus having independently controllable ene

Wafer processing architecture including load locks

Wafer processing cluster tool batch preheating and degassing app

Wafer processing reactor having a gas flow control system and me

Wafer spacing mask for a substrate support chuck and method of f

Wafer stage for manufacturing a semiconductor device

Wafer support device

Wafer support device in semiconductor manufacturing device

Wafer support plate assembly having recessed upper pad and...

Wafer support system

Wafer support system