Modified susceptor for barrel reactor

Modified thermocouple mounting bushing and system including...

Modular architecture for semiconductor wafer fabrication...

Modular coating fixture

Modular continuous vapor deposition system

Modular device of tubular plasma source

Modular IBAD apparatus for continuous coating

Modular injector and exhaust assembly

Modular parylene deposition apparatus having vapor deposition ch

Modular plasma gun assembly for coating the inner surfaces of ho

Modular processing apparatus for processing semiconductor wafers

Modular processing apparatus for processing semiconductor wafers

Modular V-CVD diffusion furnace

Modular vapor processor system

Modulated gap segmented antenna for inductively-coupled...

Modulator for plasma-immersion ion implantation

Module for high vacuum processing

Module in an integrated delivery system for chemical vapors from

Moisture barrier sealing of fiber optic coils

Molecular beam converters for vacuum coating systems