Module in an integrated delivery system for chemical vapors from

Details Module in an integrated delivery system for chemical vapors from Module in an integrated delivery system for chemical vapors from

1994-03-10

1995-03-21

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118715, 118725, 392400, 392401, 392403, C23C 1600

Patent

active

053992008

ABSTRACT:
An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

REFERENCES:
patent: 4436674 (1984-03-01), McMenamin
patent: 4488506 (1984-12-01), Heinecke
patent: 4545801 (1985-10-01), Miyajiri
patent: 4736705 (1988-04-01), Weyburne
patent: 5024264 (1991-06-01), Natori
patent: 5079406 (1992-01-01), Nagy
patent: 5252134 (1993-10-01), Stauffer
patent: 5322710 (1994-06-01), Visser

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