Module in an integrated delivery system for chemical vapors from

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure

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Details

118715, 118725, 392400, 392401, 392403, C23C 1600

Patent

active

053992008

ABSTRACT:
An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

REFERENCES:
patent: 4436674 (1984-03-01), McMenamin
patent: 4488506 (1984-12-01), Heinecke
patent: 4545801 (1985-10-01), Miyajiri
patent: 4736705 (1988-04-01), Weyburne
patent: 5024264 (1991-06-01), Natori
patent: 5079406 (1992-01-01), Nagy
patent: 5252134 (1993-10-01), Stauffer
patent: 5322710 (1994-06-01), Visser

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