Modular injector and exhaust assembly

Details Modular injector and exhaust assembly Modular injector and exhaust assembly

2005-05-10

2005-05-10

Zervigon, Rudy (Department: 1763)

Coating apparatus

Gas or vapor deposition

C156S345330

Reexamination Certificate

active

06890386

ABSTRACT:
An injector and exhaust assembly for providing delivery of gas to a substrate is provided. The injector and exhaust assembly comprises at least two injectors positioned adjacent each other and spaced apart to form at least one exhaust channel therebetween, and a mounting plate for securing the at least two injectors, wherein each of the at least two injectors being individually mounted to or removed from the mounting plate, and the mounting plate being provided with at least one exhaust slot in fluid communication with the at least one exhaust channel. An exhaust assembly is coupled to the mounting plate to remove exhaust gases from the injectors.

REFERENCES:
patent: 4252595 (1981-02-01), Yamamoto et al.
patent: 4590042 (1986-05-01), Drage
patent: 4731995 (1988-03-01), McFarland, Jr.
patent: 5136975 (1992-08-01), Bartholomew et al.
patent: 5849088 (1998-12-01), DeDontney et al.
patent: 6022414 (2000-02-01), Miller et al.
patent: 6056824 (2000-05-01), Bartholomew et al.
patent: 6063235 (2000-05-01), Taylor
patent: 6086710 (2000-07-01), Miyashita et al.
patent: 6200389 (2001-03-01), Miller et al.
patent: 6352592 (2002-03-01), Bartholomew et al.
patent: 6454860 (2002-09-01), Metzner et al.
patent: 6521048 (2003-02-01), Miller et al.
patent: 20020134507 (2002-09-01), DeDontney et al.
patent: 03-099747 (1991-04-01), None
patent: 09-189220 (1997-07-01), None

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