Modular V-CVD diffusion furnace

Details Modular V-CVD diffusion furnace Modular V-CVD diffusion furnace

1985-07-22

1986-03-04

Plantz, Bernard F.

Coating apparatus

Gas or vapor deposition

With treating means

118728, 118715, 118733, 414253, C23C 1100

Patent

active

045734313

ABSTRACT:
A novel modular V-CVD diffusion furnace includes a cylindrical quartz diffusion tube having integral end flanges, a first metallic sealing plate having gas ports removably fastened to one flange, a second metallic sealing plate having a plurality of precisely aligned gas injection tube receiving apertures removably fastened to the other flange, a like plurality of gas injection tubes slidably mounted in and sealed to corresponding gas injection tube receiving apertures, and a cylindrical quartz liner slidably mounted in the cylindrical diffusion tube.

REFERENCES:
patent: 3183130 (1965-05-01), Reynolds et al.
patent: 3189494 (1965-06-01), Short
patent: 4129090 (1978-12-01), Iraniwa et al.
patent: 4223048 (1980-09-01), Engle, Jr.
patent: 4253887 (1981-03-01), Jolly
patent: 4315479 (1982-02-01), Toole et al.
patent: 4351805 (1982-09-01), Reisman et al.
patent: 4412812 (1983-11-01), Sadowski et al.
patent: 4449037 (1984-05-01), Shibamata et al.
patent: 4466381 (1984-08-01), Jenkins
patent: 4510177 (1985-04-01), Furumura et al.

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