Method, apparatus and magnet assembly for enhancing and...
Methods and apparatus for depositing barrier coatings
Methods and apparatus for depositing barrier coatings
Methods and apparatus for externally treating a container with a
Methods and apparatus for generating plasma
Methods and apparatus for generating plasma, and semiconductor p
Methods and apparatus for improved vaporization of...
Methods and apparatus for incorporating nitrogen in oxide films
Methods and apparatus for material deposition
Methods and apparatus for passivating a substrate in a plasma re
Methods and apparatus for processing microfeature...
Methods and apparatus for selective pre-coating of a plasma...
Methods and apparatus for thermally processing wafers
Methods and apparatuses for controlling gas flow conductance...
Methods for coating particles and particles produced thereby
Methods of and apparatus for coating optical fibers
Methods of depositing materials on substrates
Methods, complexes, and system for forming metal-containing...
Methods, complexes, and system for forming metal-containing...
Methods, systems, and apparatus for uniform chemical-vapor...