Methods and apparatus for depositing barrier coatings

Details Methods and apparatus for depositing barrier coatings Methods and apparatus for depositing barrier coatings

1994-11-21

1997-07-08

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118723JR, C23C 1600

Patent

active

056456433

ABSTRACT:
A barrier coating is formed on a polymeric article, such as on the interior of a thermoplastic container. An oxidizing gas is converted to a plasma in a plasma chamber remote from the treatment chamber. The resulting plasma-activated oxidizing species are delivered to the interior of the container. An organosilicon reactant vapor is separately but simultaneously delivered to the interior of the container so that the organosilicon vapor and oxidizing active species mix within the container. An electric qfield is also applied to the container, so that the reaction products are deposited under the influence of the electrical field to form the barrier coating.

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Plein, P. and Menges, G., Plasmapolymerization as Coating Process for Plastic and Metallic Parts, Antec '88, pp. 1538-1541.

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